Specifications
ENTECH operates 2 thick film and 1 thin film laser trimming systems. All systems have a Step and Repeat Handler and can be equipped with Milli-Ohm, Giga-Ohm and Ultra- thin film options for special applications. Here are some technical details:
- Substrate size: 4" x 4" (standard), 6" x 6" (optional). Larger substrates can be processed upon request.
- Laser beam positioning accuracy: +/- 2.5µm.
- Handler positioning accuracy: +/- 6.35µm.
- Laser cut width (material dependent): thick film 25µm to 50µm (standard), thin film: 10µm to 20µm (standard).
- Scanner Matrix: 48 pins full Kelvin (extendable upon request).
- Measurement system accuracy (mid range): thick film +/- 0.035%, thin film +/- 0.02%.
- Measurement ranges (full Scale, system depending): 40 mΩ to 100 GΩ.
- IEEE und RS232c interface for functional trimming.
Some of the above data are mean values and are application and system dependent.
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